The films prepared with different fluorine containing compounds were thoroughly investigated . the quality of the films as well as the film forming ability of the solution of all the three systems are investigated by reflection microscopy and viscosimeter 综合运用sem 、 eds和tem分析了薄膜的结构,发现薄膜从里至外具有tioz层,含氟量相对较少的fha层,含氟量较高的fha层。